You searched for: “spectroscopic”
Word Entries containing the term: “spectroscopic”
spectroscopic ellipsometry
1. A spectroscopic ellipsometer allows for the accurate characterization of a range of properties including the layer thickness, optical constants, composition, crystallinity anisotropy, and uniformity.
2. Ellipsometry which uses more than one wavelength and allows variation of an angle of incidence; measures not only film thickness, but also provides information on select chemical/physical characteristics of the film(s); very useful in process monitoring and diagnostic.
3. Ellipsometry which uses more than one wavelength and allows variation of an angle of incidence; measures not only film thickness, but also provides information on select chemical/physical characteristics of the film(s); very useful in process monitoring and diagnostic.

Ellipsometry is the most common way of measuring thickness of thin films; based on the detection of phase shift of plane polarized incident light beam during reflection from the surface.

Thickness determines ranging from a few angstroms to tens of microns are possible for single layers and complex multilayer stacks.

This entry is located in the following units: scopo-, scop-, scept-, skept-, -scope-, -scopy, -scopia, -scopic, -scopist (page 27) spec-, spic-, spect-, spectat-, spectro- -spectr, -spectful, -spection, -spective (page 11)