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“microlithography”
microlithography
Any of several techniques for the production of micro scale devices; especially, the production of semiconductor devices using beams of photons or electrons.
This entry is located in the following units:
grapho-, graph-, -graph, -graphy, -grapher, -graphia
(page 54)
litho-, lith-, -lith, -lithic, -lite, -liths, -lites
(page 14)
micro-, micr-
(page 3)