You searched for: “ion probe
ion microprobe, ion probe, secondary ion mass spectrometer, SIMS
An instrument for microscopic chemical analysis, in which a beam of primary ions with an energy in the range 5-20 kilo-electron volts hit a small spot on the surface of a sample with high-energy particles, and positive and negative secondary ions sputtered from the surface are analyzed in a mass spectrometer.
This entry is located in the following unit: ion, ion- + (page 3)