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“secondary ion mass spectrometer”
ion microprobe, ion probe, secondary ion mass spectrometer, SIMS
An instrument for microscopic chemical analysis, in which a beam of primary ions with an energy in the range 5-20 kilo-electron volts hit a small spot on the surface of a sample with high-energy particles, and positive and negative secondary ions sputtered from the surface are analyzed in a mass spectrometer.
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ion, ion- +
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