You searched for: “micromechanics
micromechanics
1. The microminiaturization of mechanical devices; such as, gears, motors, rotors, etc. using similar photomasking techniques as in chip making.
2. The combination of minuscule electrical and mechanical components in a single device less than one millimeter across; such as, a valve or a motor.

Although micromechanical production processes and applications are still in the developmental process, efforts have been started to develop machines; called micromachines or micromechanisms, which will be 1,000 times smaller.